Micro-Manufacturing: Design and Manufacturing of Micro-Products / Edition 1

Micro-Manufacturing: Design and Manufacturing of Micro-Products / Edition 1

ISBN-10:
0470556447
ISBN-13:
9780470556443
Pub. Date:
05/31/2011
Publisher:
Wiley
ISBN-10:
0470556447
ISBN-13:
9780470556443
Pub. Date:
05/31/2011
Publisher:
Wiley
Micro-Manufacturing: Design and Manufacturing of Micro-Products / Edition 1

Micro-Manufacturing: Design and Manufacturing of Micro-Products / Edition 1

Hardcover

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Overview

This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place.  It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies.  After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Product Details

ISBN-13: 9780470556443
Publisher: Wiley
Publication date: 05/31/2011
Pages: 400
Product dimensions: 5.90(w) x 9.40(h) x 1.00(d)

About the Author

Muammer Koç, PhD, is the Director of National Science Foundation (NSF)-Industry/University Cooperative Research Center (I/UCRC) on Precision Forming (CPF), Associate Professor in the Department of Mechanical Engineering at Virginia Commonwealth University; and Associate Professor of Department of Industrial Engineering at Istanbul Sehir University. His research interests include manufacturing processes and systems, micro-manufacturing, design of nano/micro-scale functional surface structures, and product innovation.

Tuğrul Özel, PhD, is the Director of Manufacturing Automation Research Laboratory and Associate Professor in the Department of Industrial and Systems Engineering at Rutgers University in New Jersey. His research interests include manufacturing processes and automated systems, computational modeling of machining processes, laser-based micro/nano processing, and design and manufacturing of micro-products.

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Table of Contents

Foreword vii

Contributors ix

1 Fundamentals of Micro-Manufacturing 1

2 Micro-Fabrication Processes in Semiconductor Industry 25

3 Modeling and Analysis at Micro-Scales 43

4 Metrology, Inspection, and Process Control in Micro-Scales 71

5 Micro-Layered Manufacturing 97

6 Micro-Laser Processing 159

7 Polymer Micro-Molding/Forming Processes 197

8 Mechanical Micro-Machining 235

9 Micro-Forming 275

10 Micro-Electro Discharge Machining (μEDM) 301

11 Metal Injection Molding at Micro-Scales (μMIM) 347

Index 371

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